发明名称 |
Thermo-sensitive flow rate sensor |
摘要 |
A thermo-sensitive flow rate sensor that has a flow rate detecting device, in which a heating element constituted by thermo-sensitive resistor film, is formed on a top surface of a plate-like substrate and in which a diaphragm is formed by partially removing the plate-like substrate. This sensor further has a supporting element arranged in such a way as to have a top surface that is parallel to the direction of flow of a fluid to be measured. The flow rate detecting device is supported and fixed in a recess portion formed in the supporting element so that the top surface of the device is nearly flush with the top surface of the supporting element. Further, the thin-plate-like member is attached to the back surface of the flow rate detecting device in such a way as to close a cavity.
|
申请公布号 |
US6393907(B1) |
申请公布日期 |
2002.05.28 |
申请号 |
US19990379353 |
申请日期 |
1999.08.23 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
YAMAKAWA TOMOYA;YONEZAWA FUMIYOSHI;URAMACHI HIROYUKI |
分类号 |
G01P5/12;G01F1/68;G01F1/684;G01F1/692;G01F1/698;(IPC1-7):G01F1/68 |
主分类号 |
G01P5/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|