发明名称 Crystalline layer on a Si substrate, is formed by epitaxial precipitation on a porous region of the substrate
摘要 <p>A process for forming a crystalline layer (2) composed of a semiconductor compound on a Si substrate comprises epitaxial precipitation. The substrate is formed with a surface that has a porous region (1). The crystalline layer is formed on the porous region.</p>
申请公布号 DE102004059651(A1) 申请公布日期 2006.06.14
申请号 DE20041059651 申请日期 2004.12.10
申请人 ROBERT BOSCH GMBH 发明人 LAERMER, FRANZ;KRONMUELLER, SILVIA;REICHENBACH, RALF;FEYH, ANDO;DADGAR, ARMIN
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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