发明名称 |
SPUTTERING AND METHODS FOR DEPOSITING A FILM CONTAINING TIN AND NIOBIUM |
摘要 |
Sputtering targets and sputtering methods for depositing a film that includes tin and niobium. Substrates bearing coatings comprising tin and niobium, for example, low-emissivity coatings including blocker films comprising tin and niobium, or solar control coatings (e.g., conductive oxide coatings) including tin and niobium methods of manufacturing sputtering targets comprising tin and niobium. |
申请公布号 |
WO2007070249(A3) |
申请公布日期 |
2007.08.30 |
申请号 |
WO2006US45689 |
申请日期 |
2006.11.29 |
申请人 |
CARDINAL CG COMPANY;HARTIG, KLAUS |
发明人 |
HARTIG, KLAUS |
分类号 |
H01J37/34;C03C17/06;C03C17/09;C03C17/22;C03C17/245;C03C17/34;C03C17/36;C03C17/40;C23C4/12;C23C14/34;C23C14/35;E06B3/67 |
主分类号 |
H01J37/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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