| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator element manufacturing method that allows to simply manufacture an actuator element which enables to obtain a large displacement amount while maintaining practical driving force, facilitates miniaturization and integration, and has a small environmental load; and also, that allows to simultaneously manufacture an array of a plurality of elements. <P>SOLUTION: The method includes a step of providing a photocurable release layer and partition-wall layers on a substrate, a step of selectively curing the release layer while exposing each recessed region formed by the partition-wall layers, a step of forming a laminated body including a layer deformed by an electric field and an electrode layer in each recessed region, and a step of removing the partition-wall layers together with the non-cured release layer. Consequently, it is possible to simultaneously and simply manufacture the array of a plurality of the elements while facilitating the miniaturization and integration. <P>COPYRIGHT: (C)2008,JPO&INPIT |
