INTERFACE PROPERTY MEASURING DEVICE AND METHOD

摘要

Low-cost interface property measuring device and method enabling high-precision and simple measurement of an interface property. The interface property measuring device comprises an optical fiber probe (1) having a first end face (2) at least part of which is inclined with respect to a direction perpendicular to a fiber axis, a light supplying means (24) for supplying light from a second end face on the side opposite to the first end face of the optical fiber probe, a reflected light amount measuring means (24) for measuring the reflected light amount obtained by the light supplied by the light supplying means being reflected by the first end face and returning to the second end face, and a moving means (18) for moving at least one of the optical fiber probe and an object (21) to be measured such that the first end face of the optical fiber probe passes through an interface (23) of the object (21) at a constant speed, and the interface property measuring device acquires the interface property of the object to be measured according to the result of measurement of the reflected light amount when the first end face of the optical fiber probe passes through the interface of the object to be measured.