Optical to optical methods enhancing the sensitivity and resolution of ultraviolet, electron beam and ion beam devices

摘要

In decreasing the electron beam duration required for increased time resolution, the average beam current decreases, degrading measurement sensitivity and limiting the spatial and time resolution of electron beam and ion beam devices. Optical to optical measurements using two imaging devices permits non-invasive or non-destructive enhancements permits enhanced spatial and time measurements and enables a new regime of internal device and process evaluation and quality control in integrated circuit (IC) manufacture, at every stage from the initial wafer to the point at which the wafer is diced into individual ICs.

主权项

1. An optical image detection method for enhancing time and spatial resolution in internal integrated circuit testing in at least one phase of evaluation and manufacture, using a first infrared or optical imaging device that is sensitive to an incident electron beam or ion beam or X-ray beam or ultraviolet illumination which stimulates a secondary electron emission or creates a photocurrent or changes in electric field or stresses within or acting upon the first imaging device, and a second infrared imaging device that is illuminated by light incident to the first imaging device which is reflected to the second imaging device which images optical changes in phase or polarization or amplitude or birefringence or intensity within the first imaging device, the method comprising:
(a) imposing a first optical beam over an area comprising at least one of the following: an incident electron beam, an incident ion beam, or a X-ray beam or an optical illumination modulating the optical beam incident to the first imaging device; (b) adjusting the modulation of the incident optical beam relative to the duration or intensity or movement of the electron or ion beam or X-ray beam or an ultraviolet illumination to enhance the optical sampling time resolution of the first optical beam, or to examine the spatial attributes of a feature which is shaped or determined by the incident electron beam, or ion beam, or an incident ultraviolet illumination, or the effects thereof, (c) and, illuminating the second infrared imaging device by light incident to the first imaging device which is reflected to the second imaging device to image optical changes in phase or polarization or amplitude or birefringence or intensity within the first imaging device.