| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor evaluation device and a method for inspecting a chuck stage capable of inspecting and managing a mounting surface of the chuck stage with ease.SOLUTION: A semiconductor evaluation device 1 comprises: a chuck stage 6 on which a semiconductor wafer is placed in evaluation; an inspection jig 2 that consists of a plate-like insulation material, and that has resistive elements respectively fitting a plurality of through-holes on the insulation material, and that is placed on the chuck stage 6 so that the resistive elements are contacted with a mounting surface of the chuck stage 6 at inspection of the mounting surface; and a contact probe 9 arranged contactably with an opposite surface to a surface at a side contacted with the chuck stage 6, of the resistive elements.SELECTED DRAWING: Figure 1 |
