| 发明名称 | Method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method | ||
| 摘要 | The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure. | ||
| 申请公布号 | US9416001(B2) | 申请公布日期 | 2016.08.16 |
| 申请号 | US201414570652 | 申请日期 | 2014.12.15 |
| 申请人 | Universiteit Twente | 发明人 | Berenschot Johan Willem;Tas Niels Roelof |
| 分类号 | B81C1/00;C03C25/68;B82Y35/00;G01Q70/10;G01Q70/16;B33Y10/00;B33Y80/00 | 主分类号 | B81C1/00 |
| 代理机构 | Bozicevic, Field & Francis LLP | 代理人 | Field Bret E.;Tsunozaki Makoto;Bozicevic, Field & Francis LLP |
| 主权项 | 1. A method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformal depositing at least one structural material in at least the sharp concave corner; iii) isotropically removing at least a portion of one or more of the at least one structural material; iv) depositing at least one other structural material after step iii); v) removing at least a portion of one or more earlier deposited structural material after step iv); vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure. | ||
| 地址 | Enschede NL | ||