申请人 |
KLA TENCOR TECHNOLOGIES CORPORATION;NASSER-GHODSI, MEHRAN;GOTKIS, YEHIEL;LOPATIN, SERGEY;PICKARD, GARRETT;GARCIA, RUDY F.;YU, MING LUN;KRZECZOWSKI, KENNETH;LENT, MATTHEW;HUANG, CHRIS;MACDONALD, NILES K.;BOROWICZ, STANISLAW MAREK;CHUANG, TZU-CHIN |
发明人 |
NASSER-GHODSI, MEHRAN;GOTKIS, YEHIEL;LOPATIN, SERGEY;PICKARD, GARRETT;GARCIA, RUDY F.;YU, MING LUN;KRZECZOWSKI, KENNETH;LENT, MATTHEW;HUANG, CHRIS;MACDONALD, NILES K.;BOROWICZ, STANISLAW MAREK;CHUANG, TZU-CHIN |