Printhead die with multiple termination rings

摘要

A printhead die includes a SiO2 layer grown into a surface of a silicon substrate, and a dielectric layer deposited onto an interior surface area of a substrate. Multiple termination rings are formed around the interior surface area. Each ring is defined by an absence of the dielectric layer. A berm is located in between each termination ring. Each berm is defined by the presence of the dielectric layer.

主权项

1. A printhead die comprising:
a SiO2 layer grown into a surface of a silicon substrate; a dielectric layer formed on the surface over an interior area of the substrate; a first termination ring surrounding the interior area and defined by an absence of the dielectric layer; a berm surrounding the first termination ring and defined by the presence of the dielectric layer; and a second termination ring surrounding the berm and defined by an absence of the dielectric layer.