Scanning probe microscope

摘要

A scanning type probe microscope apparatus for measuring a surface state of a sample by scanning the sample by use of a probe is disclosed. In the apparatus, the sample is inclined relative to a scan direction of the probe by a inclination mechanism. Of a signal component corresponding to the surface state of the sample, a signal component having an optional space frequency is selected to be detected by a detecting circuit. The inclination mechanism is controlled on the basis of a detection result of the detecting circuit.