发明名称 METHOD FOR FORMING FINE PATTERN USING NANOIMPRINT
摘要 <p>A method for forming a micro pattern using nano imprint is provided to form a pattern having various shapes and to output a hydrophile region and a hydrophobicity region alternately on a micro structure surface without chemical processing. A stamp(100) comprises a positive part(320) and a negative(120) part, wherein a micro structure having a hydrophile property is imprinted at the negative part. The micro structure of the stamp is copied at a surface region of a hydrophile property resist(300) which is coated on a substrate(200) by using a nano imprint.</p>
申请公布号 KR20070117134(A) 申请公布日期 2007.12.12
申请号 KR20060050928 申请日期 2006.06.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK, JUNG WOO;CHOI, HYOUNG GIL;CHO, SUNG HOON;KIM, KWANG SOO;KIM, JEONG GIL;LEE, SUK WON;LEE, MOON GU
分类号 H01L21/027 主分类号 H01L21/027
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