发明名称 METHOD OF FABRICATING SUBSTRATELESS THIN FILM FIELD-EFFECT DEVICES AND AN ORGANIC THIN FILM TRANSISTOR OBTAINABLE BY THE METHOD
摘要 A method for the manufacture of a thin-film field-effect device comprising, on a mechanical support layer, source and drain electrodes (S, D), a layer of semiconductor material (SC) for the formation of a conduction channel, and a gate electrode (G) insulated from the channel region, is described. The method provides for the use of a mechanical support layer in the form of a film (INS) of flexible, electrically-insulating material; for the formation of the source and drain electrodes (S, D) in accordance with a predetermined configuration on a first surface of the insulating film; and for the formation of the gate electrode (G) on the opposite surface of the insulating film (INS) in accordance with a predetermined configuration complementary with the configuration of the source and drain electrodes (S, D), that configuration being achieved by a lithographic technique by selective masking determined by the source and drain electrodes (S, D) which are formed on the first surface of the film (INS).
申请公布号 US2009057660(A1) 申请公布日期 2009.03.05
申请号 US20080233999 申请日期 2008.09.19
申请人 CONSIGLIO NAZIONALE DELLE RICERCHE-INFM ISTITUTO NAZION 发明人 BONFIGLIO ANNALISA;SANNA ORNELLA;SANNA SERGIO;LAMPIS GIULIA;SANNA MARCO FEDERICO;SANNA GIULIA;MAMELI FULVIA
分类号 H01L51/00;H01L;H01L21/00 主分类号 H01L51/00
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