| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak defect detecting method capable of detecting easily the leakage defect generated inside a pixel. SOLUTION: This leak defect detecting method is provided with a voltage impression process for connecting an ammeter A to one out of a plurality of source inspection lines H and for impressing a prescribed source voltage onto the other source inspection lines H, and for impressing an ON-voltage to one out of a plurality of gate inspection lines I and for impressing an OFF-voltage onto the other gate inspection lines I; a leakage current measuring process for measuring the leakage current flowing through the ammeter A, and a leakage defect detecting process for detecting the leak defect, based on the measured leak current, the voltage impression process and the leakage current measuring process are executed in all the combinations of selecting one by one, respectively, the source inspection lines H connected with the ammeter A and the gate inspection lines I impressed with the ON-voltage, and the leakage defect detecting process detects the leakage defect, based on the measured leak current, with respect to all combinations. COPYRIGHT: (C)2009,JPO&INPIT
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