LIGHT IRRADIATION APPARATUS

摘要

A light irradiation apparatus includes: a rotary holding unit that rotates a substrate around a rotary axis while holding the substrate; a lighting unit positioned to face the rotary holding unit; a light shielding mask positioned between the rotary holding unit and the lighting unit, and widened along a direction orthogonal to the rotary axis; and a driving unit that linearly moves the lighting unit along the direction orthogonal to the rotary axis. The light shielding mask overlaps with the substrate when viewed in the direction of the rotary axis. The light shielding mask has an opening portion. An opening width of the opening portion at a side away from the rotary axis is larger than the opening with near the rotary axis. The lighting unit irradiates light through the opening portion toward the surface of the substrate while being moved above the opening portion by the driving unit.

主权项

1. A light irradiation apparatus comprising:
a rotary holding unit configured to rotate a substrate around a rotary axis extending in a direction orthogonal to a surface of the substrate while holding the substrate; a lighting unit positioned to face the rotary holding unit; a light shielding mask positioned between the rotary holding unit and the lighting unit, and widened along a direction orthogonal to the rotary axis; and a driving unit configured to linearly move the lighting unit along the direction orthogonal to the rotary axis, wherein the light shielding mask overlaps with the substrate to cover the surface of the substrate held on the rotary holding unit, when viewed in the direction of the rotary axis, the light shielding mask has an opening portion that extends toward an outside from the rotary axis in the direction orthogonal to the rotary axis, an opening width of the opening portion at a side away from the rotary axis being larger than the opening width near the rotary axis in the direction orthogonal to the rotary axis, and the lighting unit irradiates light through the opening portion toward the surface of the substrate held on the rotary holding unit while being moved above the opening portion by the driving unit.