发明名称 STACKED METAL LAYERS WITH DIFFERENT THICKNESSES
摘要 A semiconductor chip includes a plurality of stacked conductive layers. The plurality of stacked conductive layers includes a first conductive layer, a second conductive layer, and a third conductive layer. The first conductive layer is disposed on a first side of the second conductive layer. The third conductive layer is disposed on a second side of the second conductive layer. The third conductive layer is disposed on a side of the second conductive layer. The second conductive layer has a thickness which is thicker than those of the first conductive layer and the third conductive layer.
申请公布号 US2016181257(A1) 申请公布日期 2016.06.23
申请号 US201514969730 申请日期 2015.12.15
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. 发明人 LIAW JHON JHY
分类号 H01L27/11;H01L29/78;H01L23/528 主分类号 H01L27/11
代理机构 代理人
主权项 1. A semiconductor chip, comprising: a plurality of stacked conductive layers, wherein the plurality of stacked conductive layers comprise: a first conductive layer;a second conductive layer, wherein the first conductive layer is disposed on a first side of the second conductive layer; anda third conductive layer, wherein the third conductive layer is disposed on a second side of the second conductive layer; andthe second conductive layer has a thickness which is thicker than those of the first conductive layer and the third conductive layer.
地址 HSINCHU TW