METHODS OF FORMING SEMICONDUCTOR DEVICES USING AUXILIARY LAYERS FOR TRIMMING MARGIN

摘要

A method of fabricating a semiconductor device includes forming a linear preliminary mask pattern in a first direction on a substrate. The preliminary mask pattern is patterned to provide a plurality of mask patterns that are aligned end-to-end with one another on the substrate and are separated by an exposed portion of the substrate between respective facing ends of the plurality of mask patterns. An auxiliary layer is formed to cover at least sidewalls of the facing ends to reduce a size of the exposed portion to provide a reduced exposed portion of the substrate and the reduced exposed portion of the substrate is etched to form a trench defining active patterns in the substrate aligned end-to-end with one another.

主权项

1. A method of fabricating a semiconductor device, comprising:
forming mask patterns on a substrate; forming an auxiliary layer on the substrate and on sidewalls of the mask patterns; anisotropically etching the auxiliary layer to form auxiliary patterns on the sidewalls of the mask patterns, the auxiliary layer having an etch selectivity with respect to the substrate; and etching the substrate using the mask patterns and the auxiliary patterns as an etch mask to form a trench defining active patterns.