RADIO FREQUENCY POWER SOURCE DEVICE, AND POWER SOURCE FOR DUAL CATHODES

摘要

A radio frequency power source device having a configuration in which an output from a radio frequency output circuit is divided into two to deliver alternating current voltages that are opposite in phase from one another has the inability to switch as needed between different voltage values of high voltage and low voltage, and a decrease in the output terminal voltage to 1/2 the output voltage peak value of the radio frequency output circuit. In the radio frequency power source device according to the present invention, the connection state of a voltage divider, whereby radio frequency voltages from the division at the voltage divider are divided into alternating current voltages that are opposite in phase from one another with respect to a ground potential, is switched to change the voltage ratio between two output terminal voltages, thereby outputting a high voltage and a low voltage by switching therebetween. The connection state switching at the voltage divider allows different voltage values of high voltage and low voltage to be output selectively. By selecting and outputting the high voltage at high voltage output time, a decrease from the output voltage of the radio frequency output circuit is suppressed at the output terminals of the radio frequency power source device.