| 摘要 |
Provided is a tank (2) that is for liquid chemical substances, that prevents contamination of a liquid chemical substance as soon as possible, and that can be suitably used as a tank for liquid chemical substances of high purity such as high purity trichlorosilane. The tank (2) includes a tank main body (4) and a connection unit (6) attached to the tank main body (4). The connection unit (6) includes: a chemical substance flow path (8) having an immersed section (8a) that is immersed in the chemical substance within the tank main body (4) and an extend-out section (8b) that extends out of the tank main body (4); and a gas flow path (10) that extends out from one end that is communicatively connected with the inside of the tank main body (4). The extend-out section (8b) of the chemical substance flow path (8) is disposed with a first on-off valve means (14) located downstream when viewed in a loading direction of the chemical substance into the tank main body (4), and a second on-off valve means (16) located upstream when viewed in the loading direction of the chemical substance. The gas flow path (10) is disposed with a third on-off valve means (20) located downstream when viewed in a flowing direction of gas to the tank main body (4), and a fourth on-off valve means (22) located upstream when viewed in the flowing direction of gas. The connection unit (6) further includes a link flow path (12) that links a site between the first on-off valve means (14) and the second on-off valve means (16) in the chemical substance flow path (8), to a site between the third on-off valve member (20) and the fourth on-off valve means (22) in the gas flow path (10). The link flow path (12) is disposed with a fifth on-off valve means (24). |
