发明名称 |
RESIN COMPOSITION FOR FORMING UNDERLAYER FILM, LAMINATE, PATTERN FORMING METHOD, KIT FOR FORMING IMPRINT, AND METHOD FOR MANUFACTURING DEVICE |
摘要 |
Provided are: a resin composition for forming an underlayer film, which is capable of improving mold releasability when a mold is separated from a cured product layer of a photocurable composition; a laminate; a pattern forming method; a kit for forming an imprint; and a method for manufacturing a device. This resin composition for forming an underlayer film contains a resin, a mold release agent that has at least one group selected from among ionic groups and silane coupling groups, and a solvent. |
申请公布号 |
WO2016152600(A1) |
申请公布日期 |
2016.09.29 |
申请号 |
WO2016JP57907 |
申请日期 |
2016.03.14 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
OOMATSU Tadashi;KITAGAWA Hirotaka;GOTO Yuichiro |
分类号 |
C09D201/00;B29C59/02;B32B27/00;C08F299/00;C08K5/00;C08L101/00;C09D5/00;C09D7/12;H01L21/027 |
主分类号 |
C09D201/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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