| 摘要 |
A deposition apparatus includes a chamber maintaining a vacuum atmosphere, a deposition material container within the chamber, the deposition material container containing a deposition material, a substrate fixing part that faces the deposition material container to fix a substrate, a mask fixing part on a first surface of the substrate, the mask fixing part including a plurality of magnets on the first surface of the substrate, a driving cam unit that reciprocates along a first direction, a following cam unit that reciprocates in a second direction crossing the first direction in accordance with a reciprocation direction of the driving cam unit, and a driving motor to supply a predetermined power to the driving cam unit, and a mask on a second surface of the substrate attachable to the substrate by a magnetic force of the plurality of magnets. |
| 主权项 |
1. A deposition apparatus, comprising:
a chamber maintaining a vacuum atmosphere; a deposition material container within the chamber to contain a deposition material; a substrate fixing part to face the deposition material container and to fix a substrate; a mask fixing part on a first surface of the substrate, the mask fixing part including:
a plurality of magnets on the first surface of the substrate,a driving cam unit that reciprocates along a first direction,a following cam unit that reciprocates in a second direction crossing the first direction in accordance with a reciprocation direction of the driving cam unit, anda driving motor to supply a predetermined power to the driving cam unit. |
