Imprint method

摘要

An imprint method using a mold includes the steps of applying on a substrate a resin composed of a mixture of an ultraviolet curable resin cured with ultraviolet light and a luminescent material that undergoes fluorescence or phosphorescence upon receiving ultraviolet light, imprinting the mold into the resin applied to the substrate, curing the resin applied to the substrate using ultraviolet light, releasing the mold from the substrate imprinted with the pattern, and detecting light from any residual resin remaining on the mold. The imprint method can use an imprint apparatus that includes a light-emission detecting unit configured to detect light emitted from the luminescent material. After the mold is released from the resin on the substrate, the detecting step can use the light-emission detecting unit to detect light emitted from any residual resin remaining in a concave and convex portion of the pattern formed on the mold.

主权项

1. An imprint method of forming a pattern of a resin on a substrate using a mold, the imprint method comprising:
a preparing step of preparing a resin composed of a mixture of an ultraviolet curable resin that becomes cured by receiving ultraviolet light and a luminescent material that undergoes fluorescence or phosphorescence upon receiving ultraviolet light; an applying step of applying the resin prepared in the preparing step on the substrate; an imprinting step of imprinting the mold into the resin after the applying step; a curing step of curing the resin imprinted with the mold in the imprinting step using ultraviolet light; a releasing step of releasing the mold from the substrate that has been imprinted with the pattern after the curing step; and a detecting step of detecting fluorescence or phosphorescence emitted from the cured resin that remains on the mold, based on the received ultraviolet light, after the releasing step.