PROCESSING DEVICE FOR THIN-FILM SOLAR BATTERY, AND PROCESSING METHOD FOR THIN-FILM SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a processing device for a thin-film solar battery and a processing method for a thin-film solar battery that contribute to shorten a time required for forming scribe lines.SOLUTION: A processing device for a thin-film solar battery comprises: a stage for placing a substrate 10 on which an intermediate layer 23 is formed; a sharp tool for forming scribe lines 30 on the intermediate layer 23; a head for pressing the sharp tool against the intermediate layer 23; scanning means for scanning the sharp tool by moving the head relatively to the stage; and a control device that controls operations of the head and the scanning means. The control device forms processing start points 30X of the scribe lines 30 by pressing the sharp tool, and forms the scribe lines 30 on the intermediate layer 23 by scanning the sharp tool while maintaining a state where the sharp tool is pressed after the processing start points 30X are formed. A pressing force for pressing the sharp tool at the formation of the processing start points 30X is stronger than that at the formation of the scribe lines 30.SELECTED DRAWING: Figure 4