| 摘要 |
PURPOSE:To achieve higher sensitivity and a smaller size in an acceleration sensor made up of a mass section, a support section and a thin film part for connecting them together. CONSTITUTION:In an acceleration sensor which is made up of a mass section 1, a support section 2 and a thin film part 3 for connecting them together, at least parts of the mass section 1 and the thin film part 3 are so arranged to overlap in the direction of detecting acceleration. This enables the formation of the thin film part 3 longer by checking a decrease in the mass of the mass section 1 thereby achieving higher sensitivity. This also enables the formation of a gap smaller between the mass section 1 and the support section 2 without restriction by the length of the thin film part 3 thereby achieving a miniaturization of the acceleration sensor. |
