| 摘要 |
An analogue probe 100 includes a fixed structure 110 and a stylus supporting member 112 suspended relative to the fixed structure 110 by three serially connected pairs of leaf springs 114,116,118. Displacement of the supporting member 112 relative to the fixed structure 110 is transduced by three opto-electronic scale and readhead transducers 136,144;138,146;140,148. The distorting effect of bending moments applied to the tip 130 of the stylus 128 upon leaf springs 114,118 is counteracted by an increased spacing between upper ends of leaf springs of a given pair, relative to the spacing between leaf springs at their lower ends; the resulting arrangement forming a trapezium as opposed to a rectangle. This enables longer styli to be employed before distortion of the leaf springs causes failure of the opto-electronic transducers due to unwanted tilting of the supporting member 112.
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