| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device capable of performing positioning of the direction of rotation even when there is no moving mechanism on a stage, etc., on the side of a device which conveys the substrate to deliver the substrate. SOLUTION: This substrate conveying device is provided with a conveying part 1 for conveying a substrate 6 placed on a conveying arm 5 to be at the first position to the third position by way of the second position, a detecting part 3 for detecting the deviation in plane direction of rotation from a reference position of the substrate as deviated angle of rotation when the substrate is placed on the conveying arm to be in the second position, a stage 4 having the third position on its upper face, and a control part 15 for moving the conveying arm, on which the substrate is placed, from the first position, positioning the conveying arm in state where the angle equivalent to the detected, deviated angle of rotation is corrected, and then controlling the conveying part so that the substrate is positioned at the third position on the stage. |
