| 摘要 |
<p>A substrate transfer apparatus (24A) for a component mounting apparatus is provided with translatory guides (78A, 78B), and substrate holding sliders (79A, 79B). The translatory guides (78A, 78B) extend in a transfer direction (C) toward substrate receiving/transferring positions (P1, P2) and face each other at an interval (G1) in a direction orthogonally intersecting with the transfer direction (C). The substrate holding sliders (79A, 79B) are movable along the translatory guides (78A, 78B), face each other at an interval (G2) in the direction orthogonally intersecting with the transfer direction (C), and removably hold a substrate (12) by a vacuum source operating on a lower plane of the substrate. The substrate holding sliders (79A, 79B) reciprocate between the first and second substrate receiving/transferring positions (P1, P2) by an X axis driving mechanism (87) in a transfer direction of the substrate (12).</p> |
