| 摘要 |
PROBLEM TO BE SOLVED: To easily evaluate characteristics of an insulation film of a semiconductor device at a high accuracy. SOLUTION: To an input terminal of an operational amplifier OP a capacitor C1 made from first insulation film is connected. A capacitor C2 made from a second insulation film is connected between the input and output terminals of the amplifier. The relative capacitance C1/C2 of the insulation film is operated as the ratio of the output voltage to the input voltage, -Vout/Vin. The relative dielectric const.ε1/ε2 or relative film thickness T1/T2 can be operated by inserting previously measured thicknesses T1, T2 or dielectric consts.ε1,ε2 of the first and second insulation films and input and output voltages Vin, Vout in Vout=-Vin(ε1/T11)/(ε2/T2).
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