Deposition of thin films,申请号GB19990020640-传众专利搜索

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发明名称	Deposition of thin films
摘要
申请公布号	GB9920640(D0)	申请公布日期	1999.11.03
申请号	GB19990020640	申请日期	1999.09.02
申请人	SECRETARY OF STATE FOR DEFENCE, THE	发明人
分类号	C23C14/00;C23C14/08;C23C14/34;H01J37/34	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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