发明名称 |
SUBSTRATE BODY WITH A PROTECTIVE COATING |
摘要 |
<p>The invention relates to a support body with a coating of at least 95% by weight titanium boride, said coating having an oxygen content of less than or equal to 1% by weight, a metallic impurities content of less than or equal to 0.5% by weight, and a specific electrical resistance of less than or equal to 10 muOMEGA.m at room temperature.</p> |
申请公布号 |
EP0973956(A1) |
申请公布日期 |
2000.01.26 |
申请号 |
EP19980919141 |
申请日期 |
1998.03.24 |
申请人 |
AVENTIS RESEARCH & TECHNOLOGIES GMBH & CO KG |
发明人 |
SEITZ, KATHARINA;SUESSBRICH, STEPHAN;HORNUNG, MICHAEL;KUEHN, HEINRICH;HILTMANN, FRANK |
分类号 |
C04B41/50;C04B41/87;C23C4/10;C23C30/00;C25C3/08;C25C7/02;G21C3/07;(IPC1-7):C23C4/10 |
主分类号 |
C04B41/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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