发明名称 SUBSTRATE BODY WITH A PROTECTIVE COATING
摘要 <p>The invention relates to a support body with a coating of at least 95% by weight titanium boride, said coating having an oxygen content of less than or equal to 1% by weight, a metallic impurities content of less than or equal to 0.5% by weight, and a specific electrical resistance of less than or equal to 10 muOMEGA.m at room temperature.</p>
申请公布号 EP0973956(A1) 申请公布日期 2000.01.26
申请号 EP19980919141 申请日期 1998.03.24
申请人 AVENTIS RESEARCH & TECHNOLOGIES GMBH & CO KG 发明人 SEITZ, KATHARINA;SUESSBRICH, STEPHAN;HORNUNG, MICHAEL;KUEHN, HEINRICH;HILTMANN, FRANK
分类号 C04B41/50;C04B41/87;C23C4/10;C23C30/00;C25C3/08;C25C7/02;G21C3/07;(IPC1-7):C23C4/10 主分类号 C04B41/50
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