| 摘要 |
PROBLEM TO BE SOLVED: To provide workpiece alignment assembly in manufacturing of a magnetic recording disk. SOLUTION: This assembly has emboss-foil, a nest having a gas bearing plane receiving a substrate, and a piezoelectric actuator arranged near a gas bearing nest. In an embodiment, the piezoelectric actuator aligns the center of the substrate for the emboss-foil. COPYRIGHT: (C)2005,JPO&NCIPI
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