IMMERSION FLUID AND METHOD FOR PRODUCING MICROCHIPS

摘要

Method for producing microchips by using immersion lithography, wherein the immersion fluid comprises particles with a size of about 9 nm or less, and about 1 nm or more of a metal oxide, nitril or fluoride, wherein the particles have a functionalized surface. The exposure light in the method has improved resolution, so that microchips having an increased integration density are obtained.