| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system and a method using a more effective distance sensor. <P>SOLUTION: A lithographic apparatus includes: an illumination system; a support part configured to support a patterning device; and a projection system. In pixel grid imaging, a large number of small optical spots are imaged onto a substrate surface by using a micro-lens array (MLA). The z position of the MLA is adjustable in order to focus the spots on the substrate surface and/or to compensate differences in the height of the substrate surface. Convergence adjustment is performed based on an output of an ultrasonic distance sensor arranged in the vicinity of the substrate surface. <P>COPYRIGHT: (C)2010,JPO&INPIT |
