VERY SMALL PIXEL PITCH FOCAL PLANE ARRAY AND METHOD FOR MANUFACTURING THEREOF

摘要

An imaging device includes a first semiconductor layer having a first surface and a second surface and a first photodetector having a first implanted region formed in the first semiconductor layer and a pad formed over the first implanted region. The imaging device also includes a readout circuit disposed over the first surface of the first semiconductor layer. The readout circuit has a plurality of contact plugs facing the first surface of the first semiconductor layer. The imaging device further includes a second semiconductor layer disposed below the second surface of the first semiconductor, a second photodetector having a second implanted region formed in the second semiconductor layer, and a metalized via extending through the first semiconductor layer and the second semiconductor layer and electrically connecting the second implanted region to a second of the contact plugs of the readout circuit.

主权项

1. An imaging device comprising:
a first semiconductor layer having a first surface and a second surface; a first photodetector having a first implanted region formed in the first semiconductor layer and a pad formed over the first implanted region, the pad having a malleable metallic material; a readout circuit disposed over the first surface of the first semiconductor layer, the readout circuit having a plurality of contact plugs facing the first surface of the first semiconductor layer, a first of the contact plugs having a first base and a first prong extending from the first base and into the malleable metallic material of the pad of the first photodetector; a second semiconductor layer disposed below the second surface of the first semiconductor; a second photodetector having a second implanted region formed in the second semiconductor layer; and a metalized via extending through the first semiconductor layer and the second semiconductor layer and electrically connecting the second implanted region to a second of the contact plugs of the readout circuit.