| 摘要 |
Provided is a fluid control valve capable of preventing the abrasion of a valve structure due to the deformation thereof generated when closing the valve and reducing particles. The fluid control valve includes a driving unit (3); a valve body (21) including a first port (21a), a second port (21b), and a valve sheet (24); and the valve structure (4) formed into a column form and connected to the driving unit (3). The valve structure (4) includes ring-shaped protrusions (414) protruding from an end (411) of the valve sheet and including a ring-shaped seal unit (414a) sealing by being compressed to the valve sheet (24) in a front end. At least, the ring-shaped sealing protrusions are a fluoride resin. The valve structure (4) is characterized by a fact that the displacement of the ring-shaped seal unit (414a) displaced in a diameter direction is 6.175 μm or less when the ring-shaped seal unit (414a) is compressed to the valve sheet (24) by the driving unit (3). |
