| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an array of individually controllable elements for modulating radiated beam. <P>SOLUTION: An array of individually controllable elements 30 for a lithographic apparatus comprises reflectors 31 that can be actuated by an actuator and are biased, to return to a given position by a force that varies non-linearly, with respect to the displacement of the reflector 31 from that position. <P>COPYRIGHT: (C)2008,JPO&INPIT |
