| 摘要 |
The purpose of the present invention is to provide a niobic acid-based ferroelectric thin-film laminate substrate which can reduce costs while maintaining performance and characteristics as a thin-film element, and to provide a ferroelectric thin-film element cut out from said laminate substrate. This ferroelectric thin-film laminate substrate comprises, laminated in order on a substrate, a lower electrode layer, a ferroelectric thin-film layer, an upper electrode intermediate layer and an upper electrode layer, and is characterized in that the lower electrode layer comprises Pt or a Pt alloy, the ferroelectric thin-film layer comprises (K1-xNax)NbO3 (0.4 ≦ x ≦ 0.7), the upper electrode layer comprises Al or an Al alloy, the upper electrode intermediate layer comprises a metal which is less prone to oxidation than Ti and which can produce an intermetallic compound with Al, and part of the upper electrode intermediate layer and part of the upper electrode layer are alloyed. |
