GRAPHENE SYNTHESIS CHAMBER AND METHOD OF SYNTHESIZING GRAPHENE BY USING THE SAME

摘要

A graphene synthesis chamber includes: a chamber case in which a substrate including a metal thin film is placed; a gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case; a main heating unit which emits at least one light to the inner space to heat the substrate; and at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate.

主权项

1. A graphene synthesis chamber comprising:
a chamber case in which a substrate comprising a metal thin film is placed; a gas supplier which supplies at least one gas comprising a carbon gas into an inner space of the chamber case; a main heater which emits at least one light to the inner space to heat the substrate; and at least one auxiliary heater disposed between the substrate and the main heater and configured to heat an auxiliary space between the substrate and the at least one auxiliary heater for synthesizing graphene on the substrate, wherein the at least one auxiliary heater comprises graphite.