| 摘要 |
PURPOSE:To provide the photosensitivity increasing compsn. which is free from fluctuation in quality and has a high sensitivity and excellent film characteristics by using a polyamic acid compdn. having actinic functional groups at both terminals, a specific aminoacrylate compd., an amide compd. contg. carbon- carbon double bonds polymerizable by actinic radiations, and a sensitizer having a specific absorption max. wavelength as essential components. CONSTITUTION:The photosensitive polyimide resin compsn. contains (A) the polyamic acid compd. [1] having the actinic functional groups P* at both terminals, (B) the amino acrylate compd. expressed by formula [II], (C) the amide compd. contg. the carbon-carbon double bonds polymerizable by the actinic radiations, and (D) the sensitizer having 330 to 500nm absorption max. wavelength (lambdamax) as the essential components. Since this polyamic acid [I] has the multifunctional actinic sensitive groups P* at both terminals, the crosslinking density of the exposed parts increases and since the unexposed parts have the crosslinked sensitive groups P* having good solubility, the differ ence in the solubility between the exposed parts and the unexposed parts is increased and the sensitivity is enhanced. |
