SPIN COATING TYPE RESIN LIQUID COATING METHOD,申请号JP19910260924-传众专利搜索

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发明名称	SPIN COATING TYPE RESIN LIQUID COATING METHOD
摘要
申请公布号	JPH0596229(A)	申请公布日期	1993.04.20
申请号	JP19910260924	申请日期	1991.10.09
申请人	FUJITSU LTD	发明人	URADE TOSHINORI;SAITO GIICHI
分类号	B05D1/40;H01L21/027	主分类号	B05D1/40
代理机构		代理人
主权项
地址

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