| 摘要 |
<p>PURPOSE: To provide a scrubber device capable of sterilizing the inside of a circulating tank irrespective of the kind of a processing soln. without the working rate being lowered. CONSTITUTION: This scrubber device has a waste gas duct 2 to introduce a waste gas from a clean room, a circulating tank 3 filled with a processing soln. to treat the waste gas, a nozzle 4 to sprinkle the soln., a pump 5 to send the soln. in the tank 3 to the nozzle 4, a packing 6 through which the waste gas is passed and subjecting the soln. sprinkled from the nozzle 4 to a reaction and a duct 7 to discharge the waste gas passed through the packing 6 into the atmosphere. Further, a metallic body 12 is dipped in the soln. in the tank 3 to generate the sterilizing metallic ion.</p> |
