Apparatus for coating a substrate,申请号EP19960112420-传众专利搜索

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发明名称	Apparatus for coating a substrate
摘要
申请公布号	EP0783174(A3)	申请公布日期	1999.02.17
申请号	EP19960112420	申请日期	1996.08.01
申请人	BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG	发明人	SZCZYRBOWSKI, JOACHIM, DR.;TESCHNER, GOETZ;ZMELTY, ANTON
分类号	C23C14/34;C23C14/40;C23C14/56;H01J37/32;H01J37/34;(IPC1-7):H01J37/34;C23C14/35;C23C14/00	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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