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发明名称
PLASMA SOURCE OF VACUUM FILM FORMING DEVICE
摘要
申请公布号
JPH11315371(A)
申请公布日期
1999.11.16
申请号
JP19980124516
申请日期
1998.05.07
申请人
SUMITOMO HEAVY IND LTD
发明人
TANAKA MASARU
分类号
H05H1/24;C23C14/32;(IPC1-7):C23C14/32
主分类号
H05H1/24
代理机构
代理人
主权项
地址
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