| 摘要 |
PROBLEM TO BE SOLVED: To improve slidability and anti-seizing property while reducing manufacturing cost. SOLUTION: In the hydrostatic air-cushion bearing straight line guide, a touchdown plain bearing 10 (a sliding member) which is arranged to be smaller than a bearing clearance is detachably provided on a guide surface (an air-cushion bearing surface) of a table 2. The touchdown plain bearing 10 is, for example, formed from a graphite material excellent in slidablity. The touchdown plain bearing 10 is provided on the guide surface, at a front side, a rear side of travelling direction and an outside in a width direction. Protruding quantity of the touchdown plain bearing 10 is severalμm which is smaller than the bearing clearance and it should be set considering the balance of stiffness and load capacity or usage of the air bearing. COPYRIGHT: (C)2007,JPO&INPIT
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