| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer ceramic substrate which can prevent breakage from a snap line for a splitting groove before baking or breakage from a splitting groove after baking, and to provide its manufacturing method. SOLUTION: The multilayer ceramic substrate 10 is provided with an assembly 12 of a plurality of ceramic packages 11 formed of pieces at the central part of a square large insulating substrate made of a plurality of layers, a dummy part 13 in the outer periphery, and a plurality of splitting grooves 14 and 14a in the vertical and horizontal directions of both main faces facing each other to remove the dummy part 13 and divide the assembly 12 into pieces. In this case, a first dummy groove 15 parallel to the splitting groove 14a as an external shape of the assembly 12 is provided in the dummy part 13 on one main face of the large insulating substrate, and a second dummy groove 16 parallel to the splitting groove 14a as an external shape of the assembly 12 is provided in the dummy part 13 on the other main face thereof. In addition, the second dummy groove 16 is located at positions not facing the first dummy groove 15 on both main faces. COPYRIGHT: (C)2007,JPO&INPIT |
