Method of manufacturing magneto-resistive device and apparatus for manufacturing the same

摘要

A method of manufacturing a magneto-resistive device on a substrate, the device having a high MR ratio even with a low RA, and an apparatus for manufacturing the same are provided. The magneto-resistive device having an MgO (magnesium oxide) layer provided between a ferromagnetic layer and a second ferromagnetic layer is manufactured by forming a film of the MgO layer in a film forming chamber (21) with the substrate (12) being at a floating potential.