发明名称 |
Capacitive displacement sensor having a mechanical guide |
摘要 |
<p>An area-variable type capacitive displacement sensor includes: a stationary element; a movable element; an elastic member for providing a force biasing one of the stationary element and the movable member towards a remaining one thereof in a direction perpendicular to a driving direction so that the stationary element and the movable member are maintained in close contact with each other; a power supply; and a signal detecting circuit. The sensor further includes a guide means for correcting an initial alignment error and reducing an operation alignment error between the stationary element and the movable element.</p> |
申请公布号 |
EP2124014(A1) |
申请公布日期 |
2009.11.25 |
申请号 |
EP20090006766 |
申请日期 |
2009.05.19 |
申请人 |
POSTECH ACADEMY-INDUSTRY FOUNDATION |
发明人 |
KANG, DAESIL;MOON, WONKYU |
分类号 |
G01B7/00;G01D5/241 |
主分类号 |
G01B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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