ELECTRONIC DEVICE, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOBILE OBJECT

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity sensor suppressed in fluctuations in detection characteristics due to temperature change in an environment where the sensor is used, and further stabilized in detection characteristics.SOLUTION: A physical quantity sensor 1 comprises a first sensor element 99 and an outer edge part 90 provided on at least a part of the outer periphery of the first sensor element 99. In a plan view of the outer edge part 90, a first groove part 92 extending in the first direction is provided on the outer edge part 90.SELECTED DRAWING: Figure 1