| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference objective lens and optical interference measurement device including the interference objective lens that can facilitate an adjustment of a tilt of a reference mirror.SOLUTION: An interference objective lens comprises: an objective lens system; a beam splitter that is arranged between a measurement face of a measurement object and a tip part of the objective lens, branches light emitted from the objective lens system into a reference optical path and a measurement optical path, and outputs a synthetic wave having reflection light through the reference optical path synthesized with reflection light through the measurement object arranged in the measurement optical path; a reference mirror that is arranged in the reference optical path, and reflects light branched to the reference optical path by the beam splitter; a mirror holding member that has a spherical-shape outer side face, and holds the reference mirror in such a way that a reflection face of the reference mirror passes through a center of a spherical surface; a support member that has an inner side face on the spherical surface of the almost same diameter as the outer side face of the mirror holding member, and supports the outer side face of the mirror holding member due to the inner side face; and a reference mirror adjustment mechanism that adjusts a pose of the mirror holding member inside the support member.SELECTED DRAWING: Figure 3 |
