| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method in which an inclined plane for optical path conversion can be efficiently produced by laser at a low cost in the manufacturing method of the optical waveguide device in which an air interface of an inclined plane functions as an optical path conversion mirror.SOLUTION: A manufacturing method of an optical waveguide device includes the steps of: forming an optical waveguide device 5 having a plurality of optical paths on a base plate 10; arranging a reflection mechanism 50, which includes a mirror component 54 having an inclined reflection surface R and a mask 56 disposed with a plurality of opening parts 56a on the mirror component 54, on the optical waveguide 5; and irradiating laser beams on the mirror component 54 through the plurality of opening parts 56a of the mask 56 of the reflection mechanism 50, and simultaneously forming optical path conversion planes S in the plurality of optical paths by the laser beams reflected and inclined by the mirror component 54.SELECTED DRAWING: Figure 8 |
